Single Crystal Silicon Wafer Intrinsic (2 Inch)
Product Name: Single Crystal Silicon Wafer Intrinsic (2 Inch)
Product Name |
Single Crystal Silicon Wafer Intrinsic (2 Inch) |
Cat No. |
NCZ-NSC328/20 |
Size |
50.8+/- 0.2mm, |
Thickness |
430+/-10um |
Undoped |
Intrinsic |
Resistivity |
2000~4000Ω.cm |
Orientation |
<100>+/-0.5° |
Polishing |
One Side Polished |
Provided in a single wafer case
Description:
Single Crystal Silicon Wafer Intrinsic is the most widely used semiconductor material as a substrate material due to its excellent machinability, mechanical stability, and the potential to combine sensing elements and electronics on the same substrate.
Circular wafers made of silicon are used as a substrate in most MEMS sensors. The crystal orientation should be known before manufacturing since silicon has orientation-dependent properties such as piezoresistivity coefficients and etching rates. The common orientation is (100) where the numbers represent Miller indices.
As an example, (100) wafer that has a primary flat side as an indication of < 110 > direction. When a piezoresistive element is placed on a (100) wafer, the orientation should be parallel to < 110 > direction if the piezoresistivity coefficients in that direction are intended to be utilized.